The Study of 28nm BEOL Cu Gap-Fill Process
THE STUDY OF 28NM BEOL CU GAP-FILL PROCESSYu Bao, Gang Shi, Lin Gao, Yanyan Zhang, Yingming Liu, Peng Tian, Fuchun Xi, Wei Hu, Ying Gao, Zhenhua Cai, Baojun Zhao, Zhigang Yang, Jianghua Leng, Haifeng
时间:2023-06-13 热度:18℃