直拉单晶硅体生长过程中的控氧技术研究花间一壶酒下一句吴明明;周标【摘 要】The oxygen content and its uniformity of single silicon crystal will significantly affect the performance of all kinds of silicon-bad apparatus.The parameters of
三: 半导体各工艺简介Wafer ManufactureThe integrated circuits are built on single crystal substrates that are mirror like discs called wafers. Thewafers are just a starting plate for thefabrication of ele