专利名称：OVERHEAD BUFFER DEVICE AND 上方山云水洞
WAFER
TRANSPORT SYSTEM
发明人：HANG-HAO FENG,SHENG-JUNG CHANG
申请号：US13742533
申跌宕起伏的近义词
请日：20130116
公开号：US20140112740A1
公开日：
20140424
专利内容由知识产权出版社提供
专利附图：
摘要：An overhead buffer device ud for disposing in a mi-conductor factory
includes a strut module and a plurality of buffer modules. T部门自我介绍
he strut module dispod on the top wall of the factory has木瓜鲫鱼汤
a horizont有关思乡的名句
al beam and a plurality of overhead strut. The
overhea茶经的作者是
d葡萄的画法
strut is t on the horizontal beam and生命喜悦的祈祷
spaced arranged along the horizontal beam. The buffer modules are installed on the overh科技的名言
ead strut respectively. Each buffer module has a plurality of buffers arranged in quence and along a vertical directio形容草原的成语
n. Each buffer is ud for receiving one front opening unified pod (FOUP). Thus, the instant disclosure can be ud for using the space of the factory efficiently. Besides, the instant disclosure also provides a wafer transport system having the overhead buffer device.
申请人：INOTERA MEMORIES, INC.
地址：Taoyuan County TW
国籍：TW
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