SEMI F20-0997 © SEMI 1995, 1997
1SEMI F20-0997
SPECIFICATION FOR 316L STAINLESS STEEL BAR, EXTRUDED
SHAPES, PLATE, AND INVESTMENT CASTINGS FOR COMPONENTS USED IN HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS
1 Purpo
1.1 The purpo of this specification is to define the restricted melting process and material composition of 316L stainless steel required for u in the manufac-ture of components for high-purity chemical (gas or liquid) distribution systems.2 Scope
2.1 This specification defines the requirements for 316L stainless steel bar, forgings, and extruded shapes as specified in ASTM A 276, plate stock as specified in ASTM A 240, and investment castings as specified in ASTM A 743/A 743M, except as defined herein, for u in the manufacture of components ud in high-purity chemical (gas or liquid) distribution systems in miconductor manufacturing facilities.3 Referenced Documents
3.1 ASTM Standards 1
本科学历办理A 182/A 182M — Specification for Forged or Rolled Alloy-Steel Pipe Flanges, Forged Fittings, and Valves and Parts for High Temperature Service
A 240/A 240M — Specification for Heat-Resisting Chromium and Chromium-Nickel Stainless Steel Plate, Sheet, and Strip for Pressure Vesls
A 262 — Practices for Determining Susceptibility to Intergranular Attack in Austenitic Stainless Steels A 276 — Specification for Stainless and Heat-Resisting Steel Bars and Shapes
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A 479/A 479M — Specification for Stainless and Heat-Resisting Steel Bars and Shapes for U in Boilers and Other Pressure Vesls
A 480/A 480M — Specification for General Require-ments for Flat-Rolled Stainless and Heat-Resisting Steel Plate, Sheet and Strip
1 American Society for Testing and Materials, 100 Barr Harbor Drive, West Conshohoken, PA 19428-2959
A 484/A 484M — Specification for General Require-ments for Stainless and Heat-Resisting Wrought Steel Products (Except Wire)
A 743/A 743M — Specification for Castings, Iron -Chromium, Iron - Chromium - Nickel, Corrosion Resistant, for General Application
A 751 — Test Methods, Practices and Terminology for Chemical Analysis of Steel Products
E 45 — Recommended Practice for Determining the Inclusion Content of Steel
E 112 — Test Methods for Determining Average Grain Size
4 Ordering Information
ferraz4.1 Orders for bar, forgings, extruded shapes, plate, or investment castings under this specification shall include:
4.1.1 Quantity (kilograms, pounds, meters, inches, or feet)
4.1.2 Cross ction description (round, square, hex,etc. or detailed drawing)
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4.1.3 Size (nominal diameter or shape dimensions for other than tho identified with an extrusion drawing)4.1.4 Length (specific or random)4.1.5 This specification number 5 General Requirements
5.1 Bar stock, forgings, extruded shapes, or plate fur-nished under this specification shall conform to the requirements of ASTM A 182/A 182M, ASTM A 276,ATSM A 479/A 479M, ASTM A 484/A 484M, and the additional requirements herein.
5.2 Plate stock furnished under this specification shall conform to the requirements of ASTM A 240, A 480/A 480M, and the additional requirements herein.5.3 Investment castings furnished under this specifica-tion shall conform to the requirements of ASTM A
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SEMI F20-0997 © SEMI 1995, 1997743/A 743M except yield/ultimate strengths shall be at least 80% of their respective minimum values.6 Manufacture
6.1 The steel billet material ud for processing shall be manufactured by such primary melting process as Argon Oxygen Decarburization (AOD), Vacuum Oxy-gen Decarburization (VOD), or Vacuum Induction Melting (VIM), and such remelt process as Vacuum Arc Remelt (VAR) or ElectroSlag Remelt (ESR), to conform with the purity requirements specified herein.6.2 Procesd bars shall be furnished annealed and cold-finished, and extruded shapes shall be furnished hot-finis小学四年级英语下册
hed, descaled, and stretch-straightened ("Con-dition A" in the ction on Manufacture in ASTM A 276, except elongation may be a minimum of 20% for "lightly cold worked T316L").
steal的过去分词6.3 The annealing temperature ud to achieve the grain size requirement of Section 8.1 shall be 982°C (1800°F) minimum.
6.4 The steel billet material ud for investment cast-ing shall be manufactured by the Vacuum Induction Melting (VIM) plus Vacuum Arc Remelt (VAR) route per Sections 6.1 and 6.2, and remelted and cast using VIM. Castings shall be furnished in the solution treated and Hot Isostatic Presd (HIP) condition.7 Chemical Composition
7.1 Material Type — Material shall be type 316L stainless steel, as specified in Table 1 of ASTM A 182/A 182M, ASTM A 240, ASTM A 276, ASTM A 479/A 479M, or ASTM A 743/A 743M except where oth-erwi specified herein.
7.2 Composition Tolerance — No deviations in mate-rial composition from the minimum or maximum val-ues specified in the appropriate ASTM document or herein shall be allowed without approval by the pur-char.光棍节的由来
7.3 Sulfur Content — Sulfur content shall range from 0.001 to 0.004 percent.
7.4 Product Analysis — A heat analysis shall be made in accordance with ASTM A 751. The result of the heat analysis shall be reported to the purchar. In addition to the elements listed in Table 1 of ASTM A 276, the concentrations of the following elements shall be reported and are specified as:
7.4.1 Aluminum — 0.02 max 7.4.2 Calcium — 0.02 max 7.4.3 Copper — 0.25 max 7.4.4 Niobium — 0.05 max 7.4.5 Selenium — 0.02 max 7.4.6 Titanium — 0.02 max 8 Metallurgical Requirements
8.1 Grain Size — Grain size per ASTM E 112 shall be predominately 5 or finer for bar stock nominal size of 3 inches in diameter and smaller, and 3 or finer for bar stock greater than 3 inches.
8.2 Casting Grain Size — Castings shall have equi-axed grain size appropriate to meeting properties defined in Section 5.3.
8.3 Nonmetallic Inclusions — The inclusion content of the material shall be determined from reprentative samples of the material heat, in accordance with ASTM E 45, Method A, but with ratings bad on Plate III. JK ratings at billet stage shall not exceed:
JK ratings shall be provided with the material compo-sition report.
8.4 Intergranular Corrosion — Material shall be capa-ble of meeting the intergranular corrosion test speci-fied in Practice E of ASTM A 262. This requirement shall apply in the nsitized condition (1 hour at 677°C [1250°F]).
9 Mechanical Properties
9.1 Mechanical properties of all sizes and shapes shall conform to the ction on Mechanical Properties of the appropriate ASTM specification and to Section 6.2 or 5.3.
10 Certification
10.1 A certified copy of the results of all tests required by this specification shall be provided at the time of shipment. The test report shall also include the mate-
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SEMI F20-0997 © SEMI 1995, 1997
rial melting process, the heat number, and the purcha order, and shall be positively relatable to the lot of material reprented.11 Product Marking
11.1 Bar and extruded shapes shall be permanently marked with the following information:11.1.1 Manufacturer's name
11.1.2 Purchar's name and order number 11.1.3 ASTM specification number(s)11.1.4 This specification number 11.1.5 Heat number
11.1.6 Material type (i.e., 316L)
11.2 Where including all of the is impractical due to size, the heat number and customer purcha order number shall be included as a minimum.
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frostyNOTICE: The standards do not purport to address safety issues, if any, associated with their u. It is the responsibility of the ur of the standards to establish appropriate safety and health practices and to deter-mine the applicability of regulatory limitations prior to u. SEMI makes no warranties or reprentations as to the suitability of the standards t forth herein for any particular application. The determination of the suitability of the standard is solely the responsibility of the ur. Urs are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature respecting any materials men-tioned herein. The standards are subject to change without notice.
The ur’s attention is called to the possibility that compliance with this standard may require u of copyrighted material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position respecting the validity of any patent rights or copyrights asrted in connection with any item mentioned in this standard. Urs of this standard are expressly advid th
at determination of any such patent rights or copyrights, and the risk of infringment of such rights, are entirely their own responsibility.
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