专利名称:LIGHTING OPTICAL DEVICE
运动会开幕式致辞发明人:SHIBUYA MASATO,UEHARA MAKOTO 申请号:JP965385david ann
哈马斯是什么意思申请日:19850122
公开号:JPS61169815A
siso公开日:
四六级报名官网入口官网john怎么读英语19860731
专利内容由知识产权出版社提供
1级建造师考试科目>美容班培训
代词有哪些摘要:PURPOSE:To perform extremely uniform illumination by providing a generating member which generates an optical path difference among optical paths corresponding to plural light source images and a transmissivity correcting member which prevents irregularity in illumination. CONSTITUTION:Coherent parallel luminous flux from a light source 10 is pasd through a stepped prism 30 which has steps as the optical path difference generating member to form light source images as many as the steps through a lenticular lens 4, and the light source images 11 illuminate a pattern on a reticle R to form its images on a wafer W. The prism 30 have the steps which differ in optical path length and degree of light absorption and irregularity in illumination is generated on an illuminated body, so the transmissivity correcting member 70 is made different in transmissivity at parts corresponding to the respective steps of the prism 30 to uniform the intensity of the transmitted light. Thus, extremely uniform illumination having no irregularity in illumination is performed.
申请人:NIPPON KOGAKU KK
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