cerberus专利名称：Load port
发明人：Mitsuo Natsume,Shin Kawahisa,Takumi
Mizokawa
申请号：US12628822
maybe什么意思
申请日：20091201
公开号：US08821098B2
北京同声传译培训公开日：
noted>福田网页设计
jtech20140902
专利内容由知识产权出版社提供失望的意思
美白效果最好的方法
专利附图：老罗英语
摘要：A load port is disclod which allows a wafer to be transferred between the inside of a FOUP and the inside of a miconductor fabrication apparatus even during a purge operation. The load port is provided adjacent the miconductor fabrication
apparatus in a clean room and includes a purge stage having a purge port through which a gas atmosphere in the FOUP is replaced into nitrogen gas or dry air, an opener stage provided in a juxtapod relationship with the purge stage and having an opening communicating with the inside of the miconductor fabrication apparatus and a door ction capable of opening and closing the opening, and a moving mechanism for moving the FOUP between the purge stage and the opener stage.
申请人：Mitsuo Natsume,Shin Kawahisa,Takumi Mizokawa
地址：Toyohashi JP,Minato-ku JP,Toyohashi JP
国籍：JP,JP,JP
代理机构：Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.经济人
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