番禺会计培训专利名称：Automatic N2 purge system for 300 mm full
grivel
automation fab
发明人：Ko-Pin Chang,Jui-An Shih,Hui-Tang Liu,Simon
gentlemenChang,Nain-Sung Lee,Yung-Chang Peng
申请号：US10821156
申请日：20040408
公开号：US07203563B2
numberlock
公开日：
reception怎么读
20070410yua
专利内容由知识产权出版社提供
专利附图：
摘要：A system for manufacturing miconductor integrated circuit (IC) devices,
including an operating control system, a process intermediate station in communication
双月刊
with the operating control system, and a gas purge device, wherein the gas purge device is included in the process intermediate station.
amends申请人：Ko-Pin Chang,Jui-An Shih,Hui-Tang Liu,Simon Chang,Nain-Sung Lee,Yung-Chang Peng
地址：Tainan TW,Kaohsiung TW,Yongkang TW,Pingzhen TW,Shin Chu TW,Jhubei TW 国籍：TW,TW,TW,TW,TW,TW
代理机构：Haynes and Boone, LLP
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