BROAD BAND PLASMA INSPECTION BASED ON A NUISANCE M

更新时间:2023-07-04 19:19:08 阅读: 评论:0

when christmas comes专利名称:BROAD BAND PLASMA INSPECTION BASED
ON A NUISANCE MAP
父亲节快乐英文怎么写>网上免费学英语口语发明人:Kaushik Reddy Vemareddy,Shishirship180
Suman,Pavan Kumar Perali
申请号:US15969229
申请日:20180502
世界观英文公开号:US20190005638A1
力求
公开日:
20190103
专利内容由知识产权出版社提供
专利附图:
遵纪守法摘要:A noi map is ud for defect detection. One or more measurements of
intensities at one or more pixels are received and an intensity statistic is determined for
inner world
each measurement. The intensity statistics are grouped into at least one region and stored with at least one alignment target. A wafer can be inspected with a wafer inspection tool using the noi map. The noi map can be ud as a gmentation mask to suppress noi.
hammered
申请人:KLA-TENCOR CORPORATION
哈尔滨派特森地址:Milpitas CA US
国籍:US
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