专利名称：TEMPERATURE-CONTROLLED CHUCK AND METHOD FOR CONTROLLING THE中小学
frenchkiss
TEMPERATURE OF A SUBSTANTIALLY FLAT
OBJECTnomatter
4860
大专生留学发明人：John G. Maltabes,Alain B. Charles,Karl E.
Mautz
international缩写
申请号：US09871854
初二化学上册知识点
申请日：20010531英语四级口语
公开号：US20020179585A1通用记账凭证
公开日：
20021205
专利内容由知识产权出版社提供
专利附图：
nbtv
摘要：The prent invention generally relates to a method for controlling the temperature of a substantially flat object and to a temperature-controlled chuck comprising a chuck body () having an object support side () and a back side (). Said object support side () holds a substantially flat object () having a front side () and a back side () on said back side () of said object (). A plurality of temperature nsing elements () is distributed on said object support side () to measure the temperature distribution of said flat object (). A plurality of individual temperature influencing elements () is distributed on said object support side () to face said back side () of said flat object (), each of said temperature influencing elements () being arranged to influence the temperature of a partial area of said object's back side () as desired.
申请人：MOTOROLA, INC.
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