专利名称：LASER FUSE DEVICE 发明人：NAGATOMO YOSHIKI 申请号：JP24406183
prefect>finette>rolly
申请日：19831226
公开号：JPS60136333A屏息
公开日：axes
reasmbly
burst
worthwhile的用法
19850719
专利内容由知识产权出版社提供
在现翻译
摘要：PURPOSE:To enable to reduce in size of a highly integrated device by a method wherein steppings are provided on the thermally oxided film located under a lar fu, thereby enabling to reduce the damage given to a silicon substrate by a lar beam. CONSTITUTION:A fu 3 consisting of polysilicon and other conductor is formed on the thermally oxided film 2 located on a silicon substrate 1. When a stepping 1a is provided on the upper surface of said silicon substrate 1, the thermally oxided film 2 to be formed on the upper surface of the stepping 1a has a stepping 7 as a matter of cour, and the fu 3 which will be formed thereon also formed in such a manner that it has a stepping. The fu 3 is covered by a protective film 4 consisting of phosphorus glass and a thermally oxided film. When a lar beam is made to irradiate, the fu 3 is heated up to a high temperature by the given energy, it is fud, an aperture part 8 is formed, the protective film is flown off, and the fu 3 is burnt out. The generation of damage on the silicon substrate 1 is suppresd due to the existence of the heavy stepping 7 on the thermally oxided film 2.
申请人：OKI DENKI KOGYO KK
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