it is high time thataing专利名称：ILLUMINANT DISTRIBUTION EVALUATING METHOD, OPTICAL MEMBER21点梭哈
服装专业MANUFACTURING METHOD,
产品设计培训ILLUMINATION OPTICAL DEVICE, EXPOSURE
APPARATUS, AND EXPOSURE METHOD
发明人：TOYODA, MITSUNORI,KITA, NAONORI
shoo申请号：EP04771172
申请日：20040804
公开号：EP1666865A4
公开日：
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20070926
专利内容由知识产权出版社提供
摘要：A manufacturing method which can control non-uniformity of the shape of micro refracting surfaces so that the illumination distribution of a desired precision can be obtained by means of an optical member such as a micro fly's-eye lens, for example. The method compris a measurement step (S11) for measuring a two-dimensional illumination distribution generated by means of respective partial regions of the micro
fly's-eye lens, a conversion step (S12) for converting the two-dimensional illumination distribution into a one-dimensional illumination distributions along a predefined direction, a tup step (S13A) for tting up the Chebyshev polynomials as the polynomials for evaluating the one-dimensional illumination distribution, an approximation step (S13B) for approximating the one-dimensional illumination distribution by the Chebyshev polynomials to obtain the coefficients of respective terms of the power polynomials, and a control step (S14) for controlling the non-uniformity of the shape of respective optical elements, using information relating to the coefficients of respective terms as a co申请文书
ntrol
系统管理员英文indicator.
申请人：NIKON CORPORATION 更多信息请下载全文后查看
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