Multi-cusp ion source

更新时间:2023-06-19 09:27:26 阅读: 评论:0

mba是什么意思专利名称:Multi-cusp ion source
发明人:Brailove, Adam Alexander,Gwinn, Matthew
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申请号:EP99303649.0
申请日:19990511
公开号:EP0959487A2
公开日:
在线发声翻译19991124
专利内容由知识产权出版社提供
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摘要:An ion source 26 including a plasma confinement chamber 49 and a plasma electrode 70 forming a generally planar wall ction 52 of the plasma confinement chamber 49. The plasma electrode 70 has at least one opening 84 for allowing an ion
beam 88 to exit the confinement chamber 49 and has a t of magnets 78, 80 that generate a magnetic field 94 extending across the openings in the plasma electrode. The openings in the plasma electrode 70 can be fashioned as elongated slots or circular openings aligned along an axis. The ion source 26 can further include a power supply 72 for negatively biasing the plasma electrode 70 relative to the plasma confinement chamber 49 and an insulator 74 for electrically insulating the plasma electrode. Cooling tubes 122 can also be provided to transfer heat away from the magnets in the plasma electrode 70.
申请人:EATON CORPORATIONlook into>calm是什么意思
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地址:Eaton Center, 1111 Superior Avenue Cleveland, Ohio 44114-2584 US
国籍:US
代理机构:Burke, Steven David
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