3D MEMS MAGNETOMETER

更新时间:2023-06-17 13:00:34 阅读: 评论:0

求职信结尾怎么写>英语单词发音规则专利名称:3D MEMS MAGNETOMETER
发明人:Yee-Chung Fu
申请号:US13844958
申请日:20130316
公开号:US20130241546A1
公开日:
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摘要:A micro-electromechanical systems (MEMS) magnetometer includes first fixed electrodes, cond fixed electrodes, a mobile element to rotate about a first rotation axis along a first direction and translate along a cond direction orthogonal to the first direction, mobile electrodes extending from the first mobile element and being
interdigitated with the first fixed electrodes to form first nsor asmblies, a rotation element coupled to the mobile element to rotate about a cond rotation axis along the cond direction, the rotation element having a surface opposite the cond fixed electrodes to form cond nsor asmblies, the cond fixed electrode being displaced from the surface of the rotation element along a third direction, and a trace having ctions along the first direction and offt from the first rotation axis and along the cond direction and offt from the cond rotation axis.
申请人:ADVANCED NUMICRO SYSTEMS, INC.
地址:San Jo CA US
ique国籍:US
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