MPX5700Rev 8, 01/2007
Freescale Semiconductor Technical Data
© Freescale Semiconductor, Inc., 2007. All rights rerved.
Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
The MPX5700 ries piezoresistive transducer is a state-of-the-art monolithic silicon pressure nsor designed for a wide range of applications, but particularly tho employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining
techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.Features • 2.5% Maximum Error over 0° to 85°C
•Ideally Suited for Microprocessor or Microcontroller-Bad Systems •Available in Absolute, Differential and Gauge Configurations •Patented Silicon Shear Stress Strain Gauge •
Durable Epoxy Unibody Element
ORDERING INFORMATION
Device Type Options
Ca Type MPX Series
Order Number Device Marking Basic Element Differential 867MPX5700D MPX5700D Absolute
867MPX5700A MPX5700A Ported Elements
Differential Dual Ports 867C MPX5700DP MPX5700DP Gauge 867B MPX5700GP MPX5700GP Gauge, Axial 867E MPX5700GS MPX5700D Absolute 867B MPX5700AP MPX5700AP Absolute, Axial
867E MPX5700AS MPX5700A Absolute, Axial PC Mount
867F
MPX5700ASX
MPX5700A
MPX5700SERIES
INTEGRATED PRESSURE SENSOR 0 to 700 kPa (0 to 101.5 psi)15 to 700 kPa (2.18 to 101.5 psi)
0.2 to 4.7 V OUTPUT
PIN NUMBERS
1
V out 4N/C 2GND 5N/C 3
V S
6
N/C
NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead.
Figure 1. Fully Integrated Pressure Sensor Schematic
Sensing Element
Thin Film Temperature Compensation
and Gain Stage #1Gain Stage #2
and Ground Reference Shift Circuitry
V S
V out
GND
Pins 4, 5, and 6 are no connects
Sensors
MPX5700Table 1. Maximum Ratings (1)
1.Maximum Ratings apply to Ca 867 only. Extended exposure at the specified limits may cau permanent damage or degradation to the device.
Parametrics
小学英语教学反思
Symbol Value Unit Maximum Pressure (2) (P2 ≤ 1 Atmosphere)2.This nsor is designed for applications where P1 is always greater than, or equal to P2. P2 maximum is 500 kPa.
P1max 2800kPa Storage Temperature T stg –40 to +125°C Operating Temperature
T A
–40 to +125
°C
Table 2. Operating Characteristics (V S = 5.0 Vdc, T A = 25°C unless otherwi noted, P1 > P2. Decoupling circuit shown in Figure 4 required to meet electrical specifications.)
Characteristic
Symbol Min Typ Max Unit Pressure Range (1)Gauge, Differential: MPX5700D
Absolute: MPX5700A
P OP 015——700700kPa Supply Voltage (2)V S 4.75 5.0 5.25Vdc Supply Current I O —7.010mA
dc Zero Pressure Offt (3)Gauge, Differential (0 to 85°C)
Absolute (0 to 85°C)
V off 0.0880.1840.2—0.3130.409Vdc Full Scale Output (4)(0 to 85°C)V FSO 4.587 4.7 4.813Vdc Full Scale Span (5)(0 to 85°C)V FSS — 4.5—Vdc Accuracy (6)(0 to 85°C)
———±2.5%V FSS Sensitivity V/P — 6.4—-mV/kPa Respon Time (7)
t R — 1.0—-ms Output Source Current at Full Scale Output I O+—0.1—-mAdc Warm-Up Time (8)—
—
20
slow的副词—-ms
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2.Device is ratiometric within this specified excitation range.
3.Offt (V off ) is defined as the output voltage at the minimum rated pressure.
4.Full Scale Output (V FSO ) is defined as the output voltage at the maximum or full rated pressure.
26字母
5.
贝克汉姆退役Full Scale Span (V FSS ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure.
6.Accuracy (error budget) consists of the following:
•Linearity:Output deviation from a straight line relationship with pressure over the specified pressure range.•Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied.
•Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from
the minimum or maximum rated pressure, at 25°C.
•TcSpan:Output deviation over the temperature range of 0° to 85°C, relative to 25°C.•TcOfft:Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C,
relative to 25°C.
•Variation from Nominal:The variation from nominal values, for Offt or Full Scale Span, as a percent of V FSS , at 25°C.
7.Respon Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure.
8.Warm-up Time is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.
Table 3. Mechanical Characteristics
Characteristics
Typ Unit Weight, Basic Element (Ca 867)
4.0
grams
Sensors
MPX5700
ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
Figure 3 illustrates both the Differential/Gauge and the Absolute Sensing Chip in the basic chip carrier (Ca 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the nsor diaphragm. (For u of the MPX5700D in a high-pressure cyclic application, consult the factory.)
The MPX5700 ries pressure nsor operating
characteristics, and internal reliability and qualification tests are bad on u of dry air as the pressure media. Media, other than dry air, may have adver effects on nsor
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performance and long-term reliability. Contact the factory for information regarding media compatibility in your application.Figure 2 shows the nsor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit shown in Figure 4. The output will saturate outside of the specified pressure range.Figure 4 shows the recommended decoupling circuit for interfacing the output of the integrated nsor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended.
Figure 2. Output versus Pressure Differential
Figure 3. Cross-Sectional Diagrams (not to scale)
Figure 4. Recommended Power Supply Decoupling and Output Filtering (For additional output filtering, plea refer to Application Note AN1646)
Differential Pressure (kPa)
O u t p u t (V )
Typical
Minimum
5.04.54.03.53.02.52.01.51.00.500
100
七里山幼儿园
200
300
400600
500Maximum
700
怎么样画好眼线800
拜拜的英文Transfer Function:
V out = V S *(0.0012858*P+0.04) ± Error V S = 5.0 Vdc
Temperature = 0 to 85°C
Fluoro Silicone Die Coat
Wire Bond
Die
P1
Stainless Steel Metal Cover Lead Frame
RTV Die Bond
Epoxy Ca
P2
Fluoro Silicone Die Coat
Wire Bond
Die
P1
Stainless Steel Metal Cover
subtotalLead Frame
RTV Die Bond
Epoxy Ca
P2
ABSOLUTE ELEMENT
DIFFERENTIAL/GAUGE ELEMENT
+5 V
机警
1.0 µF
0.01 µF
470 pF
GND
V s
V out
IPS
Output
MPX5700PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure nsor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluoro silicone gel which protects the die from harsh media. The Freescale MPX pressure nsor is designed to operate with positive differential pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the table below:
Part Number Ca Type Pressure (P1) Side Identifier
MPX5700D, MPX5700A867Stainless Steel Cap
MPX5700DP867C Side with Part Marking
MPX5700GP, MPX5700AP867B Side with Port Attached
MPX5700GS, MPX5700AS867E Side with Port Attached
MPX5700ASX867F Side with Port Attached
Sensors
PACKAGE DIMENSIONS
ISSUE N
BASIC ELEMENT
CASE 867C-05
ISSUE F
PRESSURE AND VACUUM SIDES PORTED (DP)
MPX5700 Sensors
