VARIAN CT-100 Active Rough Vacuum Gauge 说明书

更新时间:2023-05-31 11:31:29 阅读: 评论:0

•Rapid Respon
Pirani-like respon time of 0.2 conds makes the CT-100ideal for high productivity applications where process steps are critically time-dependent. Rapid respon time enables fast-acting valves to protect turbo pumps from sudden inrush of gas.
•Selectable pressure •Provides accurate and repeatable range
readings
•0.2 cond respon time •Improves productivity and performance •Two tpoints per gauge •Enables cost and space savings •Thick nsing element •Durable and reliable design
•Single point calibration •Maintains gauge accuracy over time offt
•Status LEDs
•Quick visual indicator of vacuum status
•Versatile
Two ur-defined t points per gauge allow the triggering of multiple process steps, alarms, or other pressure-related conditions.
Selectable pressure range offers accurate and repeatable readings precily where it is most critical to the ur.Operates over the full rough pressure spectrum, (1 x 10-4Torr up to 100 Torr; 1.33 x 10-4to 133 mbar; 1.33 x 10-2Pa to 1.33 x 10-4Pa), up to nsitivity to Atmosphere.•Robust
The long-life nsing element is designed three times thicker than typical gauges which minimizes nsitivity to process vibration, shock, and all condensables found in vacuum.•Cost Effective
The robust nsing element results in longer life and higher repeatability making the CT-100 a more economical choice than traditional Pirani gauges.
Single point calibration feature maintains gauge accuracy over time, unlike other gauges where more frequent replacement is required.
•Analytical Instrumentation Applications
The CT-100 is ideal for mass spectrometers and surface analysis equipment. Two t points on a single gauge saves system cost and space.
•Industrial Applications
The CT-100’s robust nsing element withstands high gas loads and its durable design is ideal for industrial applications including e-beam welding, vacuum furnaces, evaporating systems and degassing ovens.•Loadlocks
CT-100’s rapid 0.2 cond respon time and excellent repeatability make it the ideal choice for loadlock applications.
•Other general-purpo applications, requiring pressure control or pressure quencing in the rough vacuum range.
CT-100 Active Rough Vacuum Gauge
Varian‘s new rough vacuum gauge delivers Pirani gauge performance,
at lower cost, in a simple, durable design.
藤门留学Features
Benefits
Applications
CT-100 Active Rough Vacuum Gauge
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Pressure range N2/Air Factory tting (1.000 V @ ≤1 x 10–5Torr):
1 x 10–4to 100 Torr, nsitive to ATM
(1.33 x 10–4to 133 mbar, nsitive to ATM)
(1.33 x 10–2to 1.33 x 10–4Pa, nsitive to ATM)
Optional Ur Setting (8.255 V @ ATM):
20 mTorr to ATM
(2.6 x 10–2to 1000 mbar)
(2.6 to 10–5Pa)
Respon time0.2 cond
Relay respon time<1 mc
Setpoint adjustment range Greater than gauge pressure range
Operating temperature15°C to 50°C, 90% relative humidity non-condensing
Storage temperature–15°C to 85°C
Mounting orientation Vacuum port pointing down for best results above 1 Torr (1.33 mbar, 133 Pa)
Weight with NPT Fitting113 grams (1/4lb)
Interface
Two tpoints Two ur defined pressure tpoints for process steps, alarms, high vacuum gauge trigger,
or other pressure-induced events
Setpoint Dual, non-isolated, open collector output
“Contact” Rating0.3 VDC @100mA (on)
30 VDC Max (off)
Adjustment Trim pot, panel calibration, fixed hysteresis
Analog voltage proportional to threshold available at connector (0 VDC – 12 VDC referred to analog
output), output impedance 100 kohms
Input voltage/power******************,protectedagainstreversalstaylorwane
Output signal (analog)Non-linear, 1 to 9 VDC, nominal
Fault<0.5 VDC or >9 VDC (for N2)
Output impedance100 ohms
考研网上预报名Displays
Setpoint indicators Red LEDs – Verify an operation is underway and the appropriate vacuum has been achieved Vacuum indicator Green LED – Indicates <100 mTorr vacuum is achieved
Materials of construction
Materials expod to vacuum Nickel-plated mild steel, glass, nickel alloy
Casing Flame retardant ABS (Acrylonitrile-butadiene-styrene)
officerSensor element Platinel
Sensor internal volume  5.4 mL
Connections
Electrical9-pin D-Sub
Setpoint #1 Output Setpoint #2 Output
1
2
3
4
5 6
7
8
9
••
CT-100 Active Rough Gauge
CT-100
L7426301Replacement Tube, CT-100, 1/8” NPT
L7426601
Accessories
Vacuum Connections
CT-100 to KF
Stainless Steel KF16KAFP160125S KF25KAFP250125S Aluminum
KF16KAFP160125A KF25
KAFP250125A
Interface Cable
9-Pin D-sub to
R0907XXX
flying leads, shielded
XXX = length in feet up to 100 ft.
Mating Connector
9-Pin D-sub connector kit with metal backshell
L7440301Adapter Kit
RJ45 Adapter for Edwards ATC/APG
L7439301Power Supply/Breakout Box*
nsna
670077101
(provides 24 VDC power and test points for signal access)
*Not UL, cUL, CE certified
Calibration Service
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Factory calibration
CALCNTC-1
Certification supplied, NIST traceable
Description
Part Number Description Part Number
Compatible Varian Products
Varian CT-100 Rough Vacuum Gauge is compatible with the following Varian products. For configurations and part numbers, call Varian Vacuum Technologies.
High Vacuum Gauges
Primary Pumps
High/Ultra High Vacuum四级考试时间2021年6月
Dry Scroll Pumps
Rotary Vane Pumps
Ion Pumps
Diffusion Pumps
Vacuum Valves
United States
Varian Vacuum Technologies2114
121 Hartwell Avenue Lexington, MA 02421
USA
Tel:  (781) 861 7200Fax:  (781) 860 5437Toll Free 1 (800) 882 7426Europe
Varian Vacuum Technologies Via F.lli Varian 5410040 Leinì, (Torino)Italyscenery是什么意思
Tel:  (39) 011 997 9 111Fax:  (39) 011 997 9 350Toll Free 00 800 234 234 00
w w w .v a r i a n i n c .c o m
without notice. Copyright by Varian SpA.
Ordering Information
CT-100 Active Rough Vacuum Gauge
Turbomolecular Pumps

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