专利名称：Electrostatic Chuck with Photo-Patternable
Soft Protrusion Contact Surface
发明人：I-Kuan Lin,Richard A. Cooke,Jakub
Rybczynski
蔚为壮观申请号：US13667516
申请日：20121102
公开号：US20130120897A1
chad white公开日：
pray是什么意思
20130516北京美国英语语言学院
原因的英文专利内容由知识产权出版社提供
专利附图：
believe什么意思摘要：In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved
2014世界杯解说员
manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure compris a photo-patternable polymer.
申请人：Entegris, Inc.
和风日语网sour是什么意思地址：Billerica MA US
generation gap
国籍：US
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