专利名称：Pad alignment for AlCu pad for copper
specification缩写
pronunciation怎么读process
auxo
发明人：Tsu Shih,Hung-Chang Hsieh,Chen-Cheng Kuo
申请号：US09578409
申请日：20000526
公开号：US06350680B1
公开日：
20020226
专利内容由知识产权出版社提供
专利附图：ladybird
摘要：A new method is provided for the alignment of the patterning of AlCu pads in an environment of copper interconnect line patterns. A layer of passivation material is deposited over a surface that contains alignment marks. The layer of passivation is
学历门patterned creating in the surface of the layer of passivation the opening that is required for the AlCu pad in addition to openings for a new pattern of alignment marks. A layer of AlCu is sputter deposited over the surface of the layer of passivation thereby including the openings that have been created in the layer of passivation. This creates a new pattern of alignment marks in the surface of the deposited layer of AlCu whereby the new alignment marks align with the pattern of new alignment marks that has been etched in the layer of passivation. The new alignment marks are then ud to pattern the layer of AlCu for the creation of the AlCu pad.
personality是什么意思申请人：TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
guardrail
代理人：George O. Saile,Stephen B. Ackerman
alert是什么意思
更多信息请下载全文后查看
agree的意思>冗长是什么意思
