专利名称：Damascene method for forming write coils
of magnetic heads
发明人：Donald Giles Allen,Richard Jule
Contreras,Michael Feldbaum,Murali
小学英语教学论文网Ramasubramanian
申请号：US10735112material design
sorrows
申请日：20031212
公开号：US20050125990A1
公开日：
英语情侣网名20050616
专利内容由知识产权出版社提供
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专利附图：
摘要：An improved damascene method of forming a write coil of a magnetic headfractures
includes forming a hard mask layer over an insulator layer; forming a photoresist layer over the hard mask layer; performing an image patterning process to produce a write coil pattern in the photoresist layer; etching to remove portions of the hard mask layer in accordance with the write coil pattern; etching to remove portions of the insulator layer in accordance with the write coil pattern; etching to remove the remaining portion of the etched hard mask layer; electroplating a material comprising copper (Cu) within the etched portion of the insulator material; and performing a chemical-mechanical polishing (CMP) process over the resulting structure. By removing the remainder of the hard mask material before the CMP, the quality of the CMP is improved. Although any suitable hard mask material may be utilized, if the insulator layer is a hard-baked resist then TaOhaving a relatively high lectivity, low brittleness, and improved adhesion is preferred as the hard mask material.
申请人：Donald Giles Allen,Richard Jule Contreras,Michael Feldbaum,Murali Ramasubramanian
afghanistan哪吒之魔童降世经典台词地址：Morgan Hill CA US,San Jo CA US,San Jo CA US,San Jo CA US
国籍：US,US,US,US
2012奥运会吉祥物
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