marginPhotomask Making
Roger Robbins 3/6/2007
The University ofhowold Texas at Dallas Erik Jonsson School of Engineering
Title: Photomask Making Page 1 of 24
Author: Roger Robbins 3/6/2007 Document Number: SP-07-001 The University offloat是什么意思 Texas at Dallas
Photomask Making
Roger Robbins 3/6/2007
Table of Contents
Photomask 2
Table of Contents ........................................................................................................2
Photomask 3
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.3
Mask “Color”................................................................................................................3
Process 4
Step 1: Plasma 4
Step 2: 英语词根表HMDS 5
Step 3: Resist Application ........................................................................................6
Step 4: 8
Step 5: Lithographic Patterning ................................................................................8
美式音标发音视频 Step 6: Post Bake ..................................................................................................10
abandonStep 7: 10
Step 8: Plasma 11高中竞选班长演讲稿
Step 9: Cr 12
Step 10: Resist Removal and Mask Clean .............................................................12
Step 11: Final 14
Conclusion .............................................................................................................14
Appendix A....................................................................................................................15
澳大利亚留学新政策的条件Appendix B....................................................................................................................18
Title: Photomask Making Page 2 of 24
Author: Roger Robbins 3/6/2007 Document Number: SP-07-001 The University ofxenu Texas at Dallas