专利名称：METHOD AND TOOL FOR PATTERNING THIN FILMS ON MOVING SUBSTRATES 发明人：ALLOTT, Richard冲上云霄2的英文插曲
申请号：GB2007001811
abreast
ef英孚教育申请日：20070515
regardlessof公开号：WO07/135377P1
公开日：
ifonly20071129
专利内容由知识产权出版社提供
摘要：A method for forming a regularly repeating pattern in a thin film (2) on a substrate (1, 5) by ablating it directly with radiation from a puld lar beam (3, 10) characterid in that the radiation beam (3, 10) is caud to pass through a suitable mask (7) delineating the pattern, the image of the mask pattern being de-magnified onto the surface of the film (2) by a suitable projection lens (8) so that the energy density at the film is sufficiently high so as to cau the film (2) to be removed directly by ablation, the imprinting steps being carried out: (i) in a repetitive ries of discrete lar ablation steps using a mask (7) that is stationary with respect to the projection lens (8) and reprents only a small area of the total area of the substrate (1, 5) and using a single short pul of radiation (3) at each step to illuminate the mask (7), the radiation pul having such an energy density at the substrate (1, 5) that it is above the threshold value for ablation of the film (2); and (ii) the ries of discrete lar ablation steps being repeated over the full area of the surface of a substrate (1), to give a full pattern comprising a plurality of pixels, by moving the lar beam (3, 10) or substrate (1, 5) in a direction (X1) parallel to one axis of the pattern to be formed on the substrate and activating the puld lar mask illumination light source at the instant that the substrate (1, 5) or beam (3, 10) has
遗祸
moved over a distance equivalent to a complete number of periods of the repeating pattern on the substrate (1, 5).2015高考作文
申请人：ALLOTT, Richard
all the wayswing是什么意思地址：Bradbourne Drive Tilbrook Milton Keynes MK7 8AZ GB,Oerlikon Balzers Coating (UK) Limited Bradbourne Drive Tilbrook Milton Keynes MK7 8AZ GB 国籍：GB,GB
代理机构：ROCK, Olaf, Colin
更多信息请下载全文后查看
>cappuccino是什么意思
