PELLICLE FILM

更新时间:2023-05-16 22:15:02 阅读: 评论:0

专利名称:PELLICLE FILM
不存在的女儿发明人:SEKIMOTO KENICHI,SATO SHINJI,SHIBATA KATSUYA,KIYOTA TORU
申请号:JP20497790
申请日:19900803
公开号:JPH0490546Agoaltting
公开日:
服装外贸19920324
专利内容由知识产权出版社提供
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nb什么意思>柒怎么读摘要:PURPOSE:To obtain the pellicle film which does not generate electrification and does not pick up dust at the time of production of the pellicle, transportation and mask mounting by forming a copolymer of a specific alkyl acrylate monomer on the surface of a transparent thin film consisting of polyvinyl acetal. CONSTITUTION:An antireflection layer consisting of the copolymer of the fluorine-contg. alkyl (meth)acrylate monomer expresd by formula I and the hydroxyl group-contg. alkyl (meth)acrylate monomer expresd by formula II and the copd. expresd by formula III is formed on at least one surface of the transparent thin film consisting of the polyvinyl acetal. In the formulas,redwing
洛杉矶时报
R<1> denotes H or methyl group; R<2> denotes a fluorine-contg. alkyl group and denotes the group expresd by (CH2)m(CF2)nF, where (m), (n) respectively denote an integer between 1 and 2, 3 and 14. R<3> denotes H or methyl group; R<4> denotes 2 to 4C alkyl group having an OH group at the terminal or side chain; (a), (b), (c) denote integer >=1.香港中文大学录取分数线
character是什么意思申请人:TOSOH CORP
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