专利名称：OPPOSED TARGET TYPE SPUTTERING DEVICE
pillows发明人：KADOKURA SADAO,HONJO
KAZUHIKO,KUSUHARA AKIO,AOYANAGI
jideHIROSHIkilometer
英语字母教学申请号：JP14296286
申请日：19860620
公开号：JPS63468A
compare是什么意思
公开日：可口可乐广告曲
flatland
era>mmdd
19880105
专利内容由知识产权出版社提供
摘要：PURPOSE:To form a thin film having a uniform thickness on a broad and long-sized substrate by dividing a rectangular target which is long in the transver direction of the substrate to plural parts on a long side and providing a magnetic field generating means so as to generate magnetism at the divided points as well. CONSTITUTION:The rectangular target T which is long in the transver direction of the substrate in an oppod target type sputtering device is bicted to T1, T2 and the magnetic field generating means 120 is dispod along a shielding ring 110 including the respective divided sides 110a. The magnetic field generating means 120 is constituted of a core 121 of a magnetic material which is a magnetic pole and a permanent magnet 122 coupled thereto. The permanent magnet 122 is t on the outside of a target holder 101 and the shielding ring 11 is t atop a magnet holder 105. The entire surface of the target T is approximately uniformly sputtered by sputtering the target T with the above-mentioned constitution, by which the film thickness is uniformly distributed in the transver direction of the substrate.
申请人：TEIJIN LTD
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