专利名称：Method and system for generating foundry
萝卜丝鲫鱼汤skew models using principal components
analysis
发明人：Peter Bendix
英语生日快乐申请号：US11294867
申请日：20051205
咖啡厅音乐公开号：US20070129838A1
公开日：
儿童好书推荐
20070607
无足鸟专利内容由知识产权出版社提供
专利附图：党风廉洁建设内容
摘要：Foundry skew models reprent the variation in various manufacturing
邮票用英语怎么说parameters for a given miconductor manufacturing process. Typically, foundry skew
人质歌词
models are generated by the foundries by taking measurements on large numbers of wafers. In many cas skew models are not available for a new process or are suspect becau they are bad on limited actual measurements. Methods and systems are provided for using principal components analysis to generate foundry skew models for new miconductor manufacturing process that have limited or no actual measurements available. In one embodiment, the method generally compris: lecting an existing foundry skew model for an existing miconductor manufacturing process; lecting typical model parameters for the existing foundry skew model; and performing principal component analysis on the typical model parameters.
申请人：Peter Bendix
地址：Redwood City CA US
国籍：US
更多信息请下载全文后查看
