作文我的小狗专利名称:A method for improving the etching
李炳熙resistance of the resist underlayer film by韭菜春卷
pretreatment using hydrogen gas.
发明人:石橋 謙,中島 誠,谷口 博昭,遠藤 勇樹,志垣 修平申请号:JP2018247753
素描学习
申请日:20181228
公开号:JP2022037944A
公开日:蒜香烤排骨
丘雷姆
20220310
专利内容由知识产权出版社提供
摘要:PROBLEM TO BE SOLVED: To provide a new method for improving resistance to halogen-containing gas etching. A method for improving the halogen-containing gas etching resistance of a silicon-containing film, which compris a step of etching or ashing the silicon-containing film with a hydrogen gas-containing gas before etching the halogen-containing gas. [Selection diagram] None
申请人:日産化学株式会社
地址:東京都中央区日本橋二丁目5番1号
国籍:JP三生三世十里桃花插曲
代理人:特許業務法人はなぶさ特許商標事務所
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