黑龙江社保专利名称：Electrostatic Chuck with Photo-Patternable
蒜蓉鸡爪Soft Protrusion Contact Surface
发明人：I-Kuan Lin,Richard A. Cooke,Jakub
直冷
Rybczynski
申请号：US13667516
申请日：20121102
公开号：US20130120897A1
公开日：
申请国外留学
20130516
专利内容由知识产权出版社提供
专利附图：
摘要：In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved
manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure compris a photo-patternable polymer.
香港公司开户申请人：Entegris, Inc.
地址：Billerica MA US
男生qq名字
中华民族大团结国籍：US
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