专利名称：Metallized vias in polyimide
孕妇可以吃鸭肉吗发明人：Loretta J. O'Connor,Romary A. Previti-Kelly,Thomas J. Reen
德国商务签证申请号：US08/349350
申请日：19941205
公开号：US05552638A
加瓦尔油田公开日：
特色奶茶
腊肠闷饭19960903
专利内容由知识产权出版社提供
win7忘记开机密码摘要：A process for producing a plurality of metallized vias in a polyimide dielectric is disclod. The process includes depositing a polyimide precursor, then a silane and finally a metal, after patterning the polyimide and silane. The sandwich is heated to completely imidize the polyimide, crosslink the silane and anneal the metal simultaneously. The excess metal overlying the polyimide between the vias is removed by chemical mechanical polishing using the crosslinked silane as a polish stop.
申请人：INTERNATIONAL BUSINESS MACHINES CORPORATION
代理机构：Heslin & Rothenberg, P残害的反义词
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