垃圾桶设计
专利名称：Image enhancement for multiple exposure beams
发明人：Peter Ekberg作文结尾优美句子
贵州特色美食申请号：US10778668
申请日：20040213
公开号：US07285365B2有趣的物理现象
公开日：
20071023
专利内容由知识产权出版社提供
预算员工作内容摘要：An aspect of the prent invention includes a method for patterning a workpiece covered at least partly with a layer nsitive to electromagnetic radiation by using a plurality of exposure beams having a predetermined paration in at least a first direction for exposing a pattern onto said workpiece, where said predetermined paration is fixed to an initial system pitch in said first direction, comprising the actions of: scaling a pattern pitch in said first direction to be an integer multiple of said system pitch, adjusting the initial system pitch in said first direction to be an adjusted system pitch to maintain a scale of said pattern, adjusting said predetermined paration of exposure beams to said adjusted system pitch. Other aspects of the prent invention are reflected in the detailed description, figures and claims.
武字图片申请人：Peter Ekberg
地址：Lidingö SE
国籍：SE
柏油马路代理机构：Haynes Beffel & Wolfeld LLP
代理人：Ernst J. Beffel, Jr.
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