Dual gate nitride process

更新时间:2023-05-15 04:25:26 阅读: 评论:0

驾考宝典摩托车专利名称:Dual gate nitride processPhm
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发明人:Yung Hsien Wu
申请号:US10600699
申请日:20030623中国人民大学分数线
公开号:US20040178174A1
公开日:
20040916
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摘要:A method of manufacturing a miconductor device includes providing a wafer substrate having a surface, forming a first nitride layer over the wafer substrate,
providing a layer of photoresist over the first nitride layer, patterning and defining the photoresist layer, etching the first nitride layer unmasked by the photoresist to remove
at least a portion of the first nitride layer to expo at least a portion of the substrate surface, removing the photoresist layer, and depositing a cond nitride layer over the first nitride layer and the expod substrate surface to form a nitride structure having a first thickness and a cond thickness, wherein the first thickness includes a thickness of the first nitride layer.
君权神授申请人:PROMOS TECHNOLOGIES, INC.
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