Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated
and Calibrated
The MPX5100 ries piezoresistive transducer is a state–of–the–art monolithic silicon pressure nsor designed for a wide range of applications, but particularly tho employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin–film metalliza-tion, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.
Features
• 2.5% Maximum Error over 0° to 85°C
•Ideally suited for Microprocessor or Microcontroller–Bad Systems
•Patented Silicon Shear Stress Strain Gauge
•Available in Absolute, Differential and Gauge Configurations
•Durable Epoxy Unibody Element
•Easy–to–U Chip Carrier Option
V S
SENSING ELEMENT
GND
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
PINS 4, 5 AND 6 ARE NO CONNECTS
Figure 1. Fully Integrated Pressure Sensor Schematic
V out
MAXIMUM RATINGS(1)
Parametrics Symbol Value Unit
Overpressure(2)(P1 > P2)
(P2 > P1)P max400
400
kPa
Burst Pressure(2) (P1 > P2)P burst1000kPa Storage Temperature T stg–40° to +125°°C Operating Temperature T A–40° to +125°°C
1.T C = 25°C unless otherwi noted.
2.Exposure beyond the specified limits may cau permanent damage or degradation to the device.Order this document
by MPX5100/D
MOTOROLA SEMICONDUCTOR TECHNICAL DATA
© Motorola, Inc. 1998
MPX5100
SERIES
OPERATING OVERVIEW
INTEGRATED PRESSURE
SENSOR
0 to 100 kPa (0 to 14.5 psi)
15 to 115 kPa
(2.18 to 16.68 psi)
0.2 to 4.7 Volts Output
NOTE: Pin 1 is the notched pin.
PIN NUMBER
NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground.
BASIC CHIP CARRIER
ELEMENT
CASE 867–08, STYLE 1
DIFFERENTIAL PORT OPTION CASE 867C–05, STYLE 1
1
祖国的祖怎么写2
3
V out
Gnd
V S
4
5
6
N/C
N/C
N/C
REV 6
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Motorola Sensor Device Data
MPX5100SERIES 2
Motorola Sensor Device Data OPERATING CHARACTERISTICS (V S = 5.0 Vdc, T A = 25°C unless otherwi noted, P1 > P2)
Characteristic
Symbol Min Typ Max Unit Pressure Range (1)
Gauge, Differential: MPX5100D
Absolute: MPX5100A Vacuum: MPX5100GV (11)
P OP
0150———100115100kPa
Supply Voltage (2)V S 4.75 5.0 5.25Vdc Supply Current
I o —7.010mAdc Minimum Pressure Offt (3)(0 to 85°C)
@ V S = 5.0 Volts V off 0.0880.200.313Vdc Full Scale Output (4)Differential and Absolute (0 to 85°C)@ V S = 5.0 Volts Vacuum (11)
V FSO 4.5873.688 4.7003.800 4.8133.913Vdc Full Scale Span (5)Differential and Absolute (0 to 85°C)@ V S = 5.0 Volts Vacuum (11)
V FSS —— 4.5003.600——Vdc Accuracy (6)———"2.5%V FSS Sensitivity V/P —45—mV/kPa Respon Time (7)
t R — 1.0—mS Output Source Current at Full Scale Output I o+—0.1—mAdc Warm–Up Time (8)——20—mSec Offt Stability (9)
—
—
"0.5
—
%V FSS
Decoupling circuit shown in Figure 4 required to meet electrical specifications.
MECHANICAL CHARACTERISTICS
Characteristic
Symbol Min Typ Max Unit Weight, Basic Element (Ca 867)—— 4.0—Grams Common Mode Line Pressure (10)
—
—
—
690
kPa
NOTES:
装订读音1. 1.0kPa (kiloPascal) equals 0.145 psi.
2.Device is ratiometric within this specified excitation range.
3.Offt (V off ) is defined as the output voltage at the minimum rated pressure.
4.Full Scale Output (V FSO ) is defined as the output voltage at the maximum or full rated pressure.
5.Full Scale Span (V FSS ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure.
6.Accuracy (error budget) consists of the following:•Linearity:Output deviation from a straight line relationship with pressure over the specified pressure range.•Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied.
•Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from
minimum or maximum rated pressure at 25°C.
•TcSpan:Output deviation over the temperature range of 0° to 85°C, relative to 25°C.•TcOfft:Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative
to 25°C.
•Variation from Nominal:The variation from nominal values, for Offt or Full Scale Span, as a percent of V FSS at 25°C.
7.Respon Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure.
8.Warm–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.9.Offt stability is the product’s output deviation when subjected to 1000 hours of Puld Pressure, Temperature Cycling with Bias Test.10.Common mode pressures beyond what is specified may result in leakage at the ca–to–lead interface.
11.Pressure Range: Vacuum nsor is rated to 100 kPa; part is tested to a vacuum pressure equivalent to 80 kPa.
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MPX5100SERIES 3
Motorola Sensor Device Data ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION and SIGNAL CONDITIONING
Figure 2. Output versus Pressure Differential
Figure 2 shows the nsor output signal relative to
pressure input. Typical, minimum, and maximum out-put curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit below.(The output will saturate outside of the specified pres-sure range.)
O U T P U T (V )
54.543.53PRESSURE (kPa)
元旦画
TYP
美德少年事迹材料简写MAX MIN
10
20
30
40
50
60
70
80
90
100
2.521.510.50
110
V S = 5 Vdc T A = 25°C MPX5100
S P A N R A N G E (T Y P )O U T P U T R A N G E (T Y P )OFFSET (TYP)FLUORO SILICONE GEL DIE COAT WIRE BOND
LEAD FRAME
DIE
STAINLESS STEEL METAL COVER EPOXY PLASTIC
CASE
DIFFERENTIAL/GAUGE ELEMENT
DIE BOND
FLUORO SILICONE GEL DIE COAT WIRE BOND
LEAD FRAME
DIE
STAINLESS STEEL METAL COVER EPOXY PLASTIC
怎么折小花
CASE
DIE BOND
ABSOLUTE ELEMENT
Figure 3. Cross–Sectional Diagrams
(Not to Scale)
Figure 3 illustrates both the Differential/Gauge and the Absolute Sensing Chip in the basic chip carrier (Ca 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the nsor diaphragm.
The MPX5100 ries pressure nsor operating char-acteristics, and internal reliability and qualification tests are bad on u of dry air as the pressure media. Media,other than dry air, may h
ave adver effects on nsor performance and long–term reliability. Contact the fac-tory for information regarding media compatibility in your application.
Figure 4. Recommended Power Supply Decoupling.For output filtering recommendations, plea refer to
Application Note AN1646.
1.0m F IPS
OUTPUT
月光鱼图片>描写学习的成语V S
+5 V
0.01m F
GND
V out
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MPX5100SERIES 4
Motorola Sensor Device Data Nominal Transfer Value:V out = V S (P x 0.009 + 0.04)
+/– (Pressure Error x Temp. Mult. x 0.009 x V S )V S = 5.0 V ±5% P kPa
Transfer Function (MPX5100D, MPX5100GV)
Temperature Error Multiplier
Break Points Temp Multiplier Temperature in °C
4.03.02.00.0
1.0–40
–20
20
406013012010080MPX5100D Series Pressure Error Band
Pressure in kPa
3.02.01.0–1.0–2.0–3.0
0.00
20
406080100120
Pressure Error (max)0 to 100 kPa
± 2.5 kPa
– 4030 to 851+125
3
NOTE: The Temperature Multiplier is a linear respon from 0° to –40°C and from 85° to 125°C.
140
E r r o r (k P a )
Error Limits for Pressure
MPX5100D Series
NOTE: For vacuum type parts (5100GV), Transfer Function is the same as that for 5100D Series.
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MPX5100SERIES 5
Motorola Sensor Device Data Nominal Transfer Value:V out = V S (P x 0.009 – 0.095)
+/– (Pressure Error x Temp. Mult. x 0.009 x V S )V S = 5.0 V ±5% P kPa
Transfer Function (MPX5100A)
Temperature Error Multiplier
Break Points Temp Multiplier Temperature in °C
4.03.02.00.0
1.0–40
–20
20
406013012010080MPX5100A Series Pressure Error Band
– 4030 to 851+125
整式加减
3
140
NOTE: The Temperature Multiplier is a linear respon from 0° to –40°C and from 85° to 125°C.
Pressure in kPa
3.02.01.0–1.0–2.0–3.0
0.00
20
406080100130
Pressure
Error (max)
15 to 115 kPa ± 2.5 kPa
E r r o r (k P a )
Error Limits for Pressure
MPX5100A Series
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