专利名称：SMART SELECTION AND/OR WEIGHTING OF
PARAMETERS FOR LITHOGRAPHIC PROCESS
SIMULATION
发明人：Yu CAO,Wenjin Shao,Henying Feng,Fel
Du,Martin Snajdr
申请号：US12615004
申请日：20091109
公开号：US20110113390A1
公开日：
20110512
专利内容由知识产权出版社提供
专利附图：
摘要：The prent invention generally relates to simulating a lithographic process,
and more particularly to methods for smart lection and smart weighting when lecting parameters and/or kernels ud in aerial image computation. According to one aspect, advantages in simulation throughput and/or accuracy can be achieved by lecting TCC kernels more intelligently, allowing highly accurate aerial images to be simulated using a relatively fewer number of TCC kernels than in the state of the art. In other words, the prent invention allows for aerial images to be simulated with the same or better accuracy using much less simulation throughput than required in the prior art, all el being equal.
申请人：Yu CAO,Wenjin Shao,Henying Feng,Fel Du,Martin Snajdr
地址：Cupertino CA US,Sunnyvale CA US,Fremont CA US,Santa Clara CA US,Millbrae CA US
国籍：US,US,US,US,US
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