专利名称：OVERHEAD 唯美的文章
BUFFER DEVICE AND WAFER
TRANSPORT SYSTEM
发明人：HANG-HAO FENG,SHENG-JUNG CHANG
申请号：US13742533
申请日：20130116
公开号：US20140112740A1
公开日：
20140424
专利内容由知识产权出版社提供
专利附图：
摘要：An overhead buffer device ud for disposing in a mi-conductor factory
includes a strut module and a plurality of bu情人杜拉斯
ffer modules. The strut module dispod on the top wall of the factory has a horizontal beam and a plurality of overhead strut. The
overhead strut is t on 俄罗斯地理位置
the horizontal beam and spaced arranged along the horizontal beam. The buffer modules are installed on the overhead strut respectively. Each bmx什么意思
uffer module has a plurality of buffers arranged in电影《天火》
quence and along a vertical direction. Each buffer is ud for receiving one front opening unified pod (FOUP). Thus, the instant disclosure can be ud for using the space of the factory eff个人财务规划
iciently. Besides, the instant disclosure also provides a wafer transport system having the overhead buffer devic硬奶油
e.
申请人：INOTERA MEMORIES, INC.
地址：Taoyuan County TW
国籍：TW
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