消防队扑救火灾是否收取费用专利名称：Electron source
对未来工作的期望
发明人：Yoshinori Terui,Ryozo Nonogaki
申请号：US10544227
申请日：20040203
公开号：US07556749B2
公开日：
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摘要：To provide an electron source to be ud for a surface analyzer such as a
scanning or transmission electron microscope or an Auger electron spectroscope, or an electron beam lithography machine, particularly for a miconductor wafer inspection apparatus such as a scanning electron microscope to be ud at a low acceleration with
截图翻译an electron beam acceleration voltage of up to 1 kV, CD SEM or DR SEM. An electron source wherein a barium supplying source consisting of a complex oxide comprising barium oxide and an oxide of metal other than barium, is provided at a portion of a single crystal needle of tungsten or molybdenum.
申请人：Yoshinori Terui,Ryozo Nonogaki
地址：Gunma JP,Gunma JP
国籍：JP,JP公文写作格式
代理机构：Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
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