专利名称：APPARATUS FOR CHARACTERIZATION OF
THIN FILM PROPERTIES AND METHOD OF
我最喜欢的汉字USING THE SAME
中共七大意义孟宗哭竹发明人：Vladimir Kochergin
申请号：US12488544
申请日：20090620
猪肉大葱饺子馅怎么调好吃公开号：US20100004773A1夏天像
公开日：
唐代诗人王维
20100107
砂锅羊肉专利内容由知识产权出版社提供
专利附图：
摘要：This invention provides an apparatus and method for characterization of thin film structures. More particularly, the prent invention provides methods and devices华的多音字
for fast and accurate identification of optical constants, thickness, interface roughness and stress of a nsing film structures by spectropolarimetric imaging technique. This invention also provides the method for active in-line manufacturing diagnostics and process control. The invention is broadly applicable with most important applications being manufacturing diagnostics, process control, quality control and characterization of solar cells, flat panel displays and miconductor structures.
申请人：Vladimir Kochergin
地址：Lewis Center OH US
国籍：US
更多信息请下载全文后查看
