专利名称：MEMS ARRAY, MANUFACTURING METHOD THEREOF, AND MEMS DEVICE
MANUFACTURING METHOD BASED ON THE
镜头品牌SAME
发明人：YUASA, MITSUHIRO;
劲爆战士第三部
申请号：EP03760931
申请日：20030620
公开号：EP1535879A4
建筑照片
公开日：
20060607
专利内容由知识产权出版社提供
正面光
策划书格式模板摘要：A plurality of elements such as a resistor (10), capacitor (20), and coil (30) and switches 41 to 44 for connecting the elements are formed integrally on a substrate 1 and the elements are made freely connectable to form a MEMS array. The switches 41 to 44 ud may be transistor switches or mechanical switches. It is possible to produce a MEMS device by replacing the on/off states of the switches 41 to 44 of the MEMS array with short-circuited/open states of the interconnects.
申请人：TOKYO ELECTRON LIMITED
十大最笨的狗
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