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Sensor Technologies and Micronsor
话务员Issues for Mechatronics Systems
Ren C. Luo, Fellow,柠檬可以放多久 IEEE
(Invited Paper)
Abstract-Intelligence and flexibility are esntial in a mecha-tronic product. 步步高歌曲To achieve the primary function of an integrated system, it is esntial that the functional interaction and spatial integration between mechanical, electronic, control, and informa-tion technologies be accomplished in a synergistic way. Sensors are as important in the mechatronic system as the ns are to the human being.
While the subject of nsors and the need of nsors are certainly important, it is also both pervasive and diffu. This paper cannot in any n be exhaustive of such a wide range of discussion, and will only attempt to discuss nsors related to
mechatronics. In this paper, the role of nsors in the field of mechatronicshas been identified, followed by the characterization of different nsing technologies. The discussion of micron-sor technologies, advantage of micronsors, and problems with micronsors together with multinsor fusion applications is pre-nted. An example of a capacitive micro proximity nsor using micromachining technology developed by the Center of Robotics and Intelligent Machines at North Carolina State University is also described.
I.  INTRODUCTION
尹奉吉
M ECHATRONICS  draws  heavily  on  the  concepts  of synergistic integration of mechanical engineering with electronics, computers and control in the design and manufac-turing of products and process. The key spirit of mechatronic products is to add intelligent components and systems which combines an optimum u of multidisciplinary technologies to shorten the development cycle with reduced cost and incread
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quality.
Intelligence and flexibility are esntial in a mechatronic product. To achieve the primary function of an integrated system, it is esntial that the functional interaction and spatial integration between mechanical, electronic, control, and information technologies be accomplished in a synergistic way. Sensor technologies are as important in the mechatronic system as the ns are to the human being.
It has been estimated that 两方80% of all measurements made in industry are of displacement nature. Proximity distance measurement constitutes the largest group of measurements made in science and technology. Therefore, this paper focud on the discussion on proximityhensors with different physical nsing principles such as inductive, capacitive, photoelectric,
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ultrasonic, linear variable differential transformer, etc., includ-ing nsors which are uful in mechatronic systems such as silicon nsors, fiber-optic nsors, forcekorque nsors, and load cells. Furthermore, advances in the manufacturing of silicon chips whic
h are able to integrate nsing devices and signal-processing electronics have opened the world to the development of micronsors on a scale approaching three orders of magnitude smaller than the diameter of a human hair. A combination of micronsors and multinsors and multinsor fusion will make possible a new range of appli-cations. Continuing developments in micronsor technology demonstrate that it may soon be practical to consider using very den populations of highly redundant nsors in the mechatronic products in much the same way that they appear in biological systems.
The most instructive example of mechatronic product is a car. A reasonable quality of a car is expected to be reliable, functional, capable of trouble warning and indication, nonpol-luting, etc. For all of the, there is a need for a number of nsors, about 75 or more, for a car to do the proper job. A modern appliance, too, is an example of mechatronic product. For example, a washing machine, requires a number of nsors, about 10 or more, to detect the level of water, the type of materials to be washed, the degree of dirt, the concentration of detergent, etc., so that it can provide the required immediate feedback for reliable, flexible operation.
The field of nsors is a continually developing technology of nsing and measurement techniques which span a broad spectrum of disciplines. In this paper, an overview of major current application areas which are more cloly related to mechatronic systems is discusd in Section 11. An overview of nsing principles and their characterizations in terms of their electrical output impedance is discusd in Section 111. A more detailed description on nsors which related to mechatronic systems is in Section IV. Due to the advancement of solid state technology and the great progress in material science, micronsors are now available that can measure force, pressure, dew point, or gas and flow rates in real time. This new trend of future nsor development is included in Section V.
The need for a mechatronic product capable of operating in an unstructured, dynamic environment has created a growing demand for the u of multiple distributed nsors. While most rearch in multinsor fusion has revolved around ap-plications for object recognition, developments in micronsor
technology are encouraging more rearch into affordable, highly redundant networks of micronsors which can be in-tegrated into highly compact, intelligent mechatronic product. The multinsor issues are discusd in Section V.
11. 'OVERVIEW OF MAJORCURRENT SENSOR APPLICATIONS
Back in 1988, the National Science Foundation (NSF), together with the Defen Advanced Rearch Projects Agency (DARPA, now ARPA) and the Department of Commerce, began operating an ongoing program evaluating Japane technology, which is called JTECH program, with one of its topics concentrated on the subject of nsors. The main reason to pick up nsors as the focusing subject of choice was becau of the fact that Japan is preeminently a manufacturing nation, which has invented mechatronic concept and imple-mented successfully in the past decades. In this connection, nsors play a critical role in the monitoring and control of manufacturing process.

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