Process for the production of silicon of high puri

更新时间:2023-07-20 13:41:43 阅读: 评论:0

家常鱼做法
专利名称:Process for the production of silicon of high purity
发明人:Joph C. Schumacher
申请号:US05/745861
美丽的瞬间
申请日:19761129
公开号:US04084024A
公开日:
四懂四会四个能力
医考路
乌鸡汤下奶吗
19780411
如何做意大利面天津市最低工资标准专利内容由知识产权出版社提供
摘要:A process is provided for the low cost, high volume production of polycrystalline high purity silicon by a vapor pha reduction of a halosilane, with hydrogen, the resulting polycrystalline silicon being particularly suited for u in the production of single crystal silicon for the manufacture of miconductor devices, solar cells, and the like. The process of the invention involves the reaction of metallurgical grade silicon (of a purity of about 98%) with a halogen or hydrogen halide to form a halosilane intermediate; the purification of the halosilane and of hydrogen; the parate pre-heating of the purified halosilane and of the purified hydrogen to a temperature range above the chemical reaction temperature of the halosilane and the hydrogen; injection of the halosilane and the hydrogen into a continuous flow reduction tubular reactor wherein the feed materials are instantaneously mixed in a manner which caus chemical reaction to be initiated followed by nucleation and growth of solid high purity silicon particles as the reaction mass flows through the tubular reactor; introduction of the solid-gas reaction mass stream into a cyclone type parator wherein the high purity silicon particles are collected and parated from the gas stream and ejected from the bottom of pg,2 the parator; emitting the gas stream from the top of the parator and
conducting the gas stream to a condenr- scrubber system wherein unreacted hydrogen is parat
ed and then recycled to the hydrogen pre-heater for re-u, unreacted silicon halosilane is parated and recycled to the intermediate pre- heater for re-u, and reaction product hydrogen halide is parated and recycled to the silicon halosilane generator for re-u.
申请人:J. C. SCHUMACHER CO.
小风波
代理人:Keith D. Beecher
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