Cold trap for CVD furnace

更新时间:2023-07-13 17:38:52 阅读: 评论:0

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怕冷症专利名称:Cold trap for CVD furnace
发明人:Leon Lin,Tom Fan,Steven Chen,Vito Lee,Yu-
Hsiang Wu
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申请号:US10269943
申请日:20021011
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公开号:US20040069224A1
公开日:
小狗不能吃什么
20040415
专利内容由知识产权出版社提供
专利附图:
摘要:A cold trap having improved trapping efficiency for particles, particularly以后的以后简谱
单位发放ammonium chloride fine powder particles. The cold trap has a dual-stage design,
including an upstream stage fitted with at least one trap plate and a downstream stage
花椒油怎么吃fitted with a typically cup- or cone-shaped trap core in which is provided a conically-spiraled water cooling coil. A decreasing temperature gradient is provided along the length of the cold trap, such that exhaust gas flowing through the cold trap are gradually cooled and ammonium chloride or other particles which form from the gas are trapped by the trap plate or plates and collect in the trap core. The exhaust gas exiting the downstream end of the trap core are substantially or completely devoid of particles.
申请人:TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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