Graded buffer epitaxy in aspect ratio trapping

更新时间:2023-07-13 16:52:31 阅读: 评论:0

专利名称:Graded buffer epitaxy in aspect ratio怎么新建文件
trapping
日食发明人:Cheng-Wei Cheng,Amlan Majumdar,Kuen-
Ting Shiu,Jeng-Bang Yau
奖牌怎么画申请号:US14974590
申请日:20151218
公开号:US09496347B1
公开日:
20161115
专利内容由知识产权出版社提供
专利附图:
如何跟领导请假摘要:A method of forming a miconductor device includes: providing a patterned structure comprising a silicon substrate and dielectric stacks deposited on the silicon
substrate, the dielectric stacks forming trenches exposing a plurality of surface portions of the substrate within the trenches; forming one or more epitaxial buffer layers within the trenches on the expod surface portions of the substrate; and growing a miconductor material on the epitaxial buffer layer that is the furthest away from the substrate; wherein each of the one or more epitaxial buffer layers and the miconductor material has less than about 3% lattice mismatch to the layer immediately beneath the one or more epitaxial buffer layer and the miconductor material.
申请人:International Business Machines Corporation
地址:Armonk NY US
国籍:US
广告类型代理机构:Cantor Colburn LLP
企业的愿景代理人:Louis Percello
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