专利名称：Automatic optical proximity correction (OPC)
rule generation
发明人：Xuelong Shi,Jang Fung Chen
描写除夕的古诗
申请号：US10626864
课本电子书
申请日：20030725
公开号：US07124395B2
产品宣传文案
公开日：
植树节活动
安塞腰鼓教学设计
20061017
专利内容由知识产权出版社提供
专利附图：
摘要：A method of automatically applying optical proximity correction techniques to a reticle design containing a plurality of features. The method compris the steps of: (1)generating a first t of rules for applying scatter bar assist features to the plurality of
features for a given illumination tting; (2) generating a cond t of rules for applying biasing to the plurality of features for said given illumination tting; (3) forming a look-up table containing the first t of rules and the cond t of rules; and (4) analyzing each of the plurality of features with the first t of rules and the cond t of rules contained in the look-up table to determine if either the first t of rules or the cond t of rules is applicable to a given feature. If either the first t of rules or the cond t of rules is applicable to the given feature, the given feature is modified in accordance with the applicable rule.
背静>团队意识简短总结申请人：Xuelong Shi,Jang Fung Chen
地址：Santa Clara CA US,Cupertino CA US
国籍：US,US
情歌王古巨基
代理机构：McDermott Will & Emery LLP
更多信息请下载全文后查看
