扫描机怎么用专利名称:Ceramic element夏荷花
发明人:武内 幸久,柏屋 俊克,高橋 伸夫申请号:JP1998524535
电影烈火中永生
申请日:19971128小鸡折纸
公开号:JP3904240B2
公开日:
动漫素描20070411
专利内容由知识产权出版社提供
摘要:A ceramic element compris a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24a, 24b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating ction 18 for supporting the main actuator element 26, and a fixed ction 20 for supporting the vibrating ction 18 in a vibrating manner. The anti-ferroelectric film 22 after polarization has a region Zt in which its average dielectric constant is incread in an analog manner in accordance with a voltage V applied to the pair of electrodes 24a, 24b. Specifically, an expression of p/t ≤2.5 is satisfied provided that an average film thickness of the anti-ferroelectric film 22 is t, and a pitch between the pair of electrodes 24a, 24b is p. Accordingly, the mechanical displacement amount is changed in an analog manner in accordance with the applied voltage, making it possible to maintain a displacement amount equivalent to that obtained during application of a driving voltage, in a no voltage-loaded state after completion of application of the driving voltage.
辽宁省电子税务申请人:日本碍子株式会社
地址:愛知県名古屋市瑞穂区須田町2番56号
绿水逶迤国籍:JP
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代理人:千葉 剛宏,佐藤 辰彦更多信息请下载全文后查看