百花洲
专利名称：WAFER ALIGNER普通工
发明人：Anthony C. BONORA,Justo GRACIANO
抓好党建工作申请号：US14928352
洗甲水成分
申请日：20151030
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公开号：US20160126128A1
公开日：
新发型20160505
专利内容由知识产权出版社提供
专利附图：
摘要：A miconductor wafer transport apparatus includes a frame, a transport arm movably mounted to the frame and having at least one end effector movably mounted to the arm so the at least one end effector travers, with the arm as a unit, in a first direction relative to the frame, and travers linearly, relative to the transport arm, in a
cond direction, and an edge detection nsor mounted to the transport arm so the edge detection nsor moves with the transport arm as a unit relative to the frame, the edge detection nsor being a common nsor effecting edge detection of each wafer simultaneously supported by the end effector, wherein the edge detection nsor is configured so the edge detection of each wafer is effected by and coincident with the traver in the cond direction of each end effector on the transport arm.
申请人：Brooks Automation, Inc.浪淘沙欧阳修
地址：Chelmsford MA US
国籍：US
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