Inspection device of miconductor device and insp

更新时间:2023-06-28 04:28:50 阅读: 评论:0

专利名称:Inspection device of miconductor device
and inspection method of miconductor
device
发明人:山本 由香
蔡端申请号:JP2018128329
申请日:20180705
看风景的人公开号:JP2020008373A
公开日:
生活的艺术读后感冬奥会开幕20200116
专利内容由知识产权出版社提供
专利附图:
匆匆忙忙反义词摘要:Problem to be solved: to provide a test apparatus for inspecting a
miconductor device and a method of inspecting a miconductor device in addition to
position information within a main surface of a defective portion of a miconductor device in addition to position information in a thickness direction. The apparatus for inspecting the miconductor device compris a support stand 21, a detecting ction 80, and a display ction 5.A miconductor device 4 is mounted on the support ba 21.The detecting portion 80 detects light 23 generated at the defective portion 20 of the miconductor device 4 from the cond direction crossing the first direction and the first direction with respect to the miconductor device 4 mounted on the support stage 21.The display unit 5 displays the location of the light 23 in the miconductor device 4 bad on the detection result of the light 23 by the detecting unit 80.Diagram 申请人:三菱電機株式会社魔王寨
地址:東京都千代田区丸の内二丁目7番3号
国籍:JP
英语作文万能开头结尾
代理人:特許業務法人深見特許事務所生吃三文鱼
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