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专利名称：EDGE INSPECTION
发明人：Cory Watkins,Mark Harless,Francy Abraham
申请号：US12042052
物流方案申请日：20080304
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初中女孩公开号：US20080212084A1
公开日：
20080904
专利内容由知识产权出版社提供
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摘要：A miconductor inspection tool compris an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a
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normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images
of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.
申请人：Cory Watkins,Mark Harless,Francy Abraham
地址：Chanhasn MN US,Plymouth MN US,Singapore SG
国籍：US,US,SG
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