专利名称:IMAGE COLLECTION一年级生字表上册
如何判断玉的真假发明人:KIRK, Gregory L.,DERSTINE, Matthew
深入学习W.,HWANG, Shiow-Hwei,LEWIS, Isabella T.申请号:US2010/046055
申请日:20100820
耻成语公开号:WO2011/022573A3
公开日:
20110714
专利内容由知识产权出版社提供
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专利附图:
摘要:An inspection system for creating images of a substrate. A light source directs an incident light onto the substrate, and a light source timing control controls a pul timing of the incident light. A stage holds the substrate and moves the substrate under
the incident light, so that the substrate reflects the incident light as a reflected light. A stage position nsor reports a position of the stage, and a stage position control controls the position of the stage. A time domain integration nsor receives the reflected light, and a time domain integration nsor timing control controls a line shift of the time domain integration nsor. A control system is in communication with the light source timing control, the stage position control, and the time delay integration nsor timing control, and ts the pul timing of the incident light, the position of the stage, and the line shift of the time delay integration nsor, such that a single line of the time domain integration nsor integrates reflected light from more than one pul of the incident light from the light source.
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申请人:KLA-TENCOR CORPORATION,KIRK, Gregory L.,DERSTINE, Matthew
W.,HWANG, Shiow-Hwei,LEWIS, Isabella T.
地址:KLA-Tencor Corporation Legal Department One Technology Drive Milpitas, California 95035 US,3710 Smallwood Court Pleasanton, California 94566 US,24485 Loma Prieta Avenue Los Gatos, California 95033 US,1052 Chancery Way San Ramon, California 94582 US,5588 Sweigert Road San Jo, California 95132 US
国籍:US,US,US,US,US教导主任工作总结
代理人:MCANDREWS, Kevin
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