Focud ion beam deposition using TMCTS

更新时间:2023-06-17 19:54:10 阅读: 评论:0

脚肿是什么原因
专利名称:Focud ion beam deposition using TMCTS 发明人:Hiroko Nakamura,Haruki Komano,Kazuyoshi Sugihara,Keiji Horioka,Mitsuyo Kariya,Soichi
各银行存款利率>勇气可嘉是什么意思
窗外作文700字Inoue,Ichiro Mori,Katsuya Okumura,Tadahiro
患难与共Takigawa,Toru Watanabe,Motosuke
Miyoshi,Yuichiro Yamazaki,Haruo Okano
申请号:US08/420153
申请日:19950411
公开号:US05639699A
公开日:
社会实践报告高中
19970617
专利内容由知识产权出版社提供
摘要:According to this invention, there is provided a method of repairing a bump defect of a structure obtained by forming a predetermined pattern on a substrate, having the steps of forming a first thin film consisting of a material different from that of the substrate on the substrate around the bump defect or clo to the bump defect, forming a cond thin film on the bump defect and the first thin film to flatten an upper surface of the cond thin film, performing simultaneous removal of the bump defect and the thin films on an upper portion of the projecting defect and around the bump defect using a charged particle beam, and performing removal of the thin films left in the step of performing simultaneous removal. According to this invention, there is provided to a method of repairing a divot defect of a structure obtained by forming a predetermined pattern on a substrate, having the steps of burying a material in the divot defect and forming a projecting portion projecting from a substrate surface, covering a region including the projecting portion with flattening films consisting of a material渡江战役简介
different from that of the substrate to flatten an upper surface of the region, performing simultaneous removal of the projecting portion and the flattening films around the projecting portion using a charged particle beam, and performing removal of the flattening films left in the step of performing simultaneous removal.
申请人:KABUSHIKI KAISHA TOSHIBA
代理机构:Oblon, Spivak, McClelland, Maier & Neustadt, P
更多信息请下载全文后查看代理投标公司

本文发布于:2023-06-17 19:54:10,感谢您对本站的认可!

本文链接:https://www.wtabcd.cn/fanwen/fan/89/1042983.html

版权声明:本站内容均来自互联网,仅供演示用,请勿用于商业和其他非法用途。如果侵犯了您的权益请与我们联系,我们将在24小时内删除。

相关文章
留言与评论(共有 0 条评论)
   
验证码:
推荐文章
排行榜
Copyright ©2019-2022 Comsenz Inc.Powered by © 专利检索| 网站地图