爱企业专利名称：Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
发明人：Steven Gerard Mayorga,Manchao
Xiao,Thomas Richard Gaffney
申请号：US10029892
申请日：20011221跆拳道动作
公开号：US20030149213A1
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20030807
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摘要：The prent invention is; (a) a process for stabilizing a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, against polymerization ud in a chemical vapor deposition process for silicon oxides in electronic material fabrication comprising providing an effective amount of a neutral to weakly acidic polymerization inhibitor to such cyclotetrasiloxane; and (b) a composition of a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, stabilized against polymerization ud in a chemical vapor deposition process as a precursor for silicon oxides in electronic material fabrication, comprising; such cyclotetrasiloxane and a neutral to weakly acidic polymerization inhibitor. A free radical scavenger can also be included in the process and composition.
申请人：MAYORGA STEVEN GERARD,XIAO MANCHAO,GAFFNEY THOMAS RICHARD 更多信息请下载全文后查看
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