专利名称：SEMIC0NDUCT0R DEVICE AND
MANUFACTURE THEREOF
鸡蛋炒虾仁
去上学的路上发明人：OTANI HISASHI，大谷 久,YAMAZAKI SHUNPEI，山崎 舜平,TERAMOTO SATOSHI，寺本汽车氙气灯
聡,KOYAMA JUN，小山 潤,OGATA YASUSHI，尾
形 靖,HAYAKAWA MASAHIKO，早川 昌
彦,OSAME MITSUAKI，納 光明,HAMAYA
TOSHIJI，浜谷 敏次温度计的构造
申请号：JP特願平8-326068
申请日：19961121敲打经络的危害>东北虎体重
丰满大坝公开号：JP特開平9-312404A
公开日：
19971202
专利内容由知识产权出版社提供专利附图：
做实验
摘要：PROBLEM TO BE SOLVED: To provide a thin-film transistor having high characteristics. SOLUTION: Nickel elements are lectively held in a specific regions 205 of an amorphous silicon film 203 as adjacent thereto. And the film is subjected to an annealing process for its crystallization, and then subjected to an annealing process in an oxidation atmosphere containing halogen elements to form a thermally-oxidized film 209. At this time, improvement of the crystallization and gettering of nickel elements are advanced. This crystalline silicon film has such structure that crystallization grows radially from many points. Therefore, there can be obtained a thin film transistor(TFT) which has high characteristics.
申请人：SEMICONDUCTOR ENERGY LAB CO LTD，株式会社半導体エネルギー研究所
地址：神奈川県厚木市長谷398番地
国籍：JP
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