专利名称：ILLUMINANT DISTRIBUTION EVALUATING METHOD, OPTICAL MEMBER
一诺千金的意思MANUFACTURING METHOD,
ILLUMINATION OPTICAL DEVICE, EXPOSURE
股票涨停APPARATUS, AND EXPOSURE METHOD我们在行动
工资表范本发明人：TOYODA, MITSUNORI,KITA, NAONORI
申请号：EP04771172尊敬的领导您好格式
申请日：20040804
公开号：EP1666865A4
公开日：
女女同性恋
20070926
专利内容由知识产权出版社提供
摘要：A manufacturing method which can control non-uniformity of the shape of micro refracting surfaces so that the illumination distribution of a desired precision can be obtained by means of an optical member such as a micro fly's-eye lens, for example. The method compris a measurement step (S11) for measuring a two-dimensional illumination distribution generated by means of respective partial regions of the micro
fly's-eye lens, a conversion step (S12) for converting the two-dimensional illumination distribution into a one-dimensional illumination distributions along a predefined direction, a tup step (S13A) for tting up the Chebyshev polynomials as the polynomials for evaluating the one-dimensional illumination distribution, an approximation step (S13B) for approximating the one-dimensional illumination distribution by the Chebyshev polynomials to obtain the coefficients of respective terms of the power polynomials, and a control step (S14) for controlling the non-uniformity of the shape of respective optical elements, using information relating to the coefficients of respective terms as a co
ntrol一心一力
indicator.
申请人：NIKON CORPORATION 更多信息请下载全文后查看数据传输
