专利名称：PEDESTAL INSULATOR FOR A PRE-CLEAN CHAMBER
发明人：AL-SHARIF, Mohamed, A.,STIMSON, Bradley, O.,GHOSH, Debabrata,Apartment
F101,COHEN, Barney, M.,KING-TAI NGAN,
Kenny,NARASIMHAN, Murali
申请号：EP99924517.8
申请日：19990526彩云之南歌词
变色龙课文ppt公开号：EP1088326A1
公开日：
20010404
专利内容由知识产权出版社提供
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六年级下册语文作文摘要：The invention generally provides an apparatus that reduces backside sputtering of the substrate in a pre-clean chamber and other etch chambers. The invention also provides an apparatus that reduces flaking of material from the film formed on the surfaces of the process kit and extends the specified lifetime of a process kit. One aspect of the invention provides an apparatus for supporting a substrate, comprising a support pedestal contacting a central portion of the substrate and an insulator surrounding the support pedestal, the insulator having a beveled portion extending from a circumferential edge of the substrate.
表示寒冷的词语申请人：APPLIED MATERIALS, INC.
地址：3050 Bowers Avenue,M/S 2061 Santa Clara,California 95054-3299 US
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国籍：US
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代理机构：Käck, Jürgen
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