SUBSTRATES AND METHODS OF USING THOSE SUBSTRATES

更新时间:2023-06-10 18:10:22 阅读: 评论:0

党课感想专利名称:SUBSTRATES AND METHODS OF USING THOSE SUBSTRATES
发明人:Matthew LIPSON,Christopher John
预防病毒手抄报MASON,Damoon
征税率
SOHRABIBABAHEIDARY,Jimmy Matheus
多肉图片大全
Wilhelmus VAN DE WINKEL,Bert Dirk
SCHOLTEN
申请号:US16610103
申请日:20180501
公开号:US20200073262A1芒硝的功效与作用
公开日:
20200305
专利内容由知识产权出版社提供专利附图:
故人是指什么的人摘要:A method of dislodging contamination from a part of an apparatus ud in a patterning process, the method including: providing a cleaning substrate into contact with the part of the apparatus while the part is attached to the apparatus, the cleaning substrate comprising a material configured to chemically react with the contamination; and dislodging contamination on the part of the apparatus by chemical reaction between the material and the contamination.
申请人:ASML HOLDING N.V.,ASML NETHERLANDS B.V.
检察院职能地址:Veldhoven NL,Veldhoven NL
国籍:NL,NL
更多信息请下载全文后查看
>吃燕窝的好处

本文发布于:2023-06-10 18:10:22,感谢您对本站的认可!

本文链接:https://www.wtabcd.cn/fanwen/fan/89/1032524.html

版权声明:本站内容均来自互联网,仅供演示用,请勿用于商业和其他非法用途。如果侵犯了您的权益请与我们联系,我们将在24小时内删除。

标签:专利   职能   全文
相关文章
留言与评论(共有 0 条评论)
   
验证码:
推荐文章
排行榜
Copyright ©2019-2022 Comsenz Inc.Powered by © 专利检索| 网站地图