党课感想专利名称:SUBSTRATES AND METHODS OF USING THOSE SUBSTRATES
发明人:Matthew LIPSON,Christopher John
预防病毒手抄报MASON,Damoon
征税率
SOHRABIBABAHEIDARY,Jimmy Matheus
多肉图片大全
Wilhelmus VAN DE WINKEL,Bert Dirk
SCHOLTEN
申请号:US16610103
申请日:20180501
公开号:US20200073262A1芒硝的功效与作用
公开日:
20200305
专利内容由知识产权出版社提供专利附图:
故人是指什么的人摘要:A method of dislodging contamination from a part of an apparatus ud in a patterning process, the method including: providing a cleaning substrate into contact with the part of the apparatus while the part is attached to the apparatus, the cleaning substrate comprising a material configured to chemically react with the contamination; and dislodging contamination on the part of the apparatus by chemical reaction between the material and the contamination.
申请人:ASML HOLDING N.V.,ASML NETHERLANDS B.V.
检察院职能地址:Veldhoven NL,Veldhoven NL
国籍:NL,NL
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